Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding

Despite the importance of nanofluidic transmission electron microscope (TEM) chips, a simple fabrication method has yet to be developed due to the difficulty of wafer bonding techniques using a nanoscale thick bonding layer. We present a simple and robust wafer scale bonding technique using parylene as a bonding layer. A nanoscale thick parylene layer was deposited on a silicon nitride (SiN) wafer and patterned to construct nanofluidic channels. The patterned parylene layer was directly bonded to another SiN wafer by thermal surface activation and bonding, with a bonding strength of similar to 3 MPa. Fourier transform infrared spectroscopy showed that carbon- oxygen bonds were generated by thermal activation. We demonstrated TEM imaging of gold nanoparticles suspended in liquid using the fabricated nanofluidic chip.
Publisher
IOP PUBLISHING LTD
Issue Date
2017-09
Language
English
Keywords

TRANSMISSION ELECTRON-MICROSCOPY; WET-CELL; NANOPARTICLES; PRESSURE; TEMPERATURE; PLATFORM; PLASMA; SYSTEM; FILMS

Citation

NANOTECHNOLOGY, v.28, no.37

ISSN
0957-4484
DOI
10.1088/1361-6528/aa8196
URI
http://hdl.handle.net/10203/225803
Appears in Collection
NT-Journal Papers(저널논문)
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