Materials and Wireless Microfluidic Systems for Electronics Capable of Chemical Dissolution on Demand

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Electronics that are capable of destroying themselves, on demand and in a harmless way, might provide the ultimate form of data security. This paper presents materials and device architectures for triggered destruction of conventional microelectronic systems by means of microfluidic chemical etching of the constituent materials, including silicon, silicon dioxide, and metals (e.g., aluminum). Demonstrations in an array of home-built metal-oxide-semiconductor field-effect transistors that exploit ultrathin sheets of monocrystalline silicon and in radio-frequency identification devices illustrate the utility of the approaches.
Publisher
WILEY-V C H VERLAG GMBH
Issue Date
2015-03
Language
English
Article Type
Article
Citation

ADVANCED FUNCTIONAL MATERIALS, v.25, no.9, pp.1338 - 1343

ISSN
1616-301X
DOI
10.1002/adfm.201403573
URI
http://hdl.handle.net/10203/224816
Appears in Collection
EE-Journal Papers(저널논문)BiS-Journal Papers(저널논문)
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