접합 물질의 모세관힘을 이용한 상온, 상압 MEMS 패키징

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Publisher
마이크로나노시스템학회
Issue Date
2017-03-31
Language
Korean
Citation

제19회 한국MEMS학술대회

URI
http://hdl.handle.net/10203/223996
Appears in Collection
EE-Conference Papers(학술회의논문)
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