학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2016.2 ,[iii, 89 p. :]
Variable capacitor; C-V response; linearity; resonant frequency; MEMS; 가변 커패시터; C-V 응답; 선형성; 공진 주파수; 미세전자기계소자
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