Fabrication of functional nanomaterials using block copolymer molecular assembly블록공중합체 분자조립을 이용한 기능성 나노구조체 연구

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Block copolymer (BCP) lithography has proven itself as a cost-effective, parallel, and scalable nanolithography for the densely packed periodic arrays of nanoscale features, whose typical dimension scale in 5 ~ 50 nm is beyond the resolution limit of conventional photolithography. However, it is not totally introduced to practical manufacturing processes yet. First of all, the molecular ordering and the domain alignment of the self-assembly materials are delicately influenced by the surface energy and functionality. It requires high-level foundational nanotechnology to tune the surface energy of substrate. More importantly, the self-assembly process is usually based on the weak bonding such as Van der Waals forces. As a result, self-assembled nanostructures have naturally various and much defects and are not easily controlled to obtain a well-ordered form. Herein, we introduce "straightforward surface energy modification methods for the control of the orientation of block copolymer microdomains in thin film" and "novel approaches to obtain the well-aligned nanostructure using by BCP lithography". These strategies can impart elegant routes to control the lateral orientation and orderings of BCP microdomains in thin film.
Advisors
Kim, Sang Oukresearcher김상욱researcher
Description
한국과학기술원 :신소재공학과,
Publisher
한국과학기술원
Issue Date
2012
Identifier
325007
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2012.2 ,[ii, 91 p. :]

Keywords

Self Assembly; Block Copolymers; Nanopatterning; 자기조립; 블록공중합체; 나노패턴닝

URI
http://hdl.handle.net/10203/222205
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=657244&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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