학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2016.2 ,[v, 53 p. :]
Fab-level simulation; clustered photolithography tools; affine models; exit recursion models; flow line; throughput and cycle time models; 팹 시뮬레이션; 클러스터 포토리소그래피 장비; 장비 모델; 생산능력 모델; 모델 평가
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