Highly stable 2D material (2DM) field-effect transistors (FETs) with wafer-scale multidyad encapsulation

Field-effect transistors (FETs) composed of 2D materials (2DMs) such as transition-metal dichalcogenide (TMD) materials show unstable electrical characteristics in ambient air due to the high sensitivity of 2DMs to water adsorbates. In this work, in order to demonstrate the long-term retention of electrical characteristics of a TMD FET, a multidyad encapsulation method was applied to a MoS2 FET and thereby its durability was warranted for one month. It was well known that the multidyad encapsulation method was effective to mitigate high sensitivity to ambient air in light-emitting diodes (LEDs) composed of organic materials. However, there was no attempt to check the feasibility of such a multidyad encapsulation method for 2DM FETs. It is timely to investigate the water vapor transmission ratio (WVTR) required for long-term stability of 2DM FETs. The 2DM FETs were fabricated with MoS2 flakes by both an exfoliation method, that is desirable to attain high quality film, and a chemical vapor deposition (CVD) method, that is applicable to fabrication for a large-sized substrate. In order to eliminate other unwanted variables, the MoS2 FETs composed of exfoliated flakes were primarily investigated to assure the effectiveness of the encapsulation method. The encapsulation method uses multiple dyads comprised of a polymer layer by spin coating and an Al2O3 layer deposited by atomic layer deposition (ALD). The proposed method shows wafer-scale uniformity, high transparency, and protective barrier properties against adsorbates (WVTR of 8 x 10(6) g m(2) day(1)) over one month.
Publisher
IOP PUBLISHING LTD
Issue Date
2017-02
Language
English
Keywords

THIN-FILM ENCAPSULATION; LIGHT-EMITTING DEVICES; BARRIER FILMS; OLED DISPLAY; GAS BARRIER; MOS2; TRANSPARENT; DEPOSITION; COATINGS; DIODES

Citation

NANOTECHNOLOGY, v.28, no.5

ISSN
0957-4484
DOI
10.1088/1361-6528/aa5235
URI
http://hdl.handle.net/10203/220602
Appears in Collection
EE-Journal Papers(저널논문)
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