DSpace at KOASAS: A Block Copolymer with a Huge Block-to-Block Interaction for the Significant Reduction of Line-Edge Fluctuations in Self-Assembled Patterns

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

A Block Copolymer with a Huge Block-to-Block Interaction for the Significant Reduction of Line-Edge Fluctuations in Self-Assembled Patterns

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Kim, Jong Min / Jung, Yeon Sik researcher

Publisher: 한국반도체학회

Issue Date: 2016-02-24

Language: English

Citation: 제23회 한국 반도체 학술대회

URI: http://hdl.handle.net/10203/219567

Appears in Collection: MS-Conference Papers(학술회의논문)

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