DC Field | Value | Language |
---|---|---|
dc.contributor.author | Song, Youngsoo | ko |
dc.contributor.author | Jung, Jinwook | ko |
dc.contributor.author | Shin, Youngsoo | ko |
dc.date.accessioned | 2016-12-14T00:56:07Z | - |
dc.date.available | 2016-12-14T00:56:07Z | - |
dc.date.created | 2016-11-21 | - |
dc.date.created | 2016-11-21 | - |
dc.date.created | 2016-11-21 | - |
dc.date.created | 2016-11-21 | - |
dc.date.issued | 2017-03 | - |
dc.identifier.citation | Conference on Design-Process-Technology Co-Optimization for Manufacturability XI | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | http://hdl.handle.net/10203/214688 | - |
dc.description.abstract | Redundant via (RV) insertion is employed to enhance via manufacturability, and has been extensively studied. Self-aligned double patterning (SADP) process, brings a new challenge to RV insertion since newly created cut for each RV insertion has to be taken care of. Specifically, when a cut for RV, which we simply call RV-cut, is formed, cut conflict may occur with nearby line-end cuts, which results in a decrease in RV candidates. We introduce cut merging to reduce the number of cut conflicts; merged cuts are processed with stitch using litho etch -litho-etch (LELE) multi-patterning method. In this paper, we propose a new RV insertion method with cut merging in SADP for the first time. In our experiments, a simple RV insertion yields 55.3% vias to receives RVs; our proposed method that considers cut merging increases that number to 69.6% on average of test circuits. | - |
dc.language | English | - |
dc.publisher | SPIE | - |
dc.title | Redundant via insertion in self-aligned double patterning | - |
dc.type | Conference | - |
dc.identifier.wosid | 000405560100003 | - |
dc.identifier.scopusid | 2-s2.0-85020499673 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Conference on Design-Process-Technology Co-Optimization for Manufacturability XI | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | San Jose, California | - |
dc.identifier.doi | 10.1117/12.2258036 | - |
dc.contributor.localauthor | Shin, Youngsoo | - |
dc.contributor.nonIdAuthor | Jung, Jinwook | - |
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