Luminescent Silicon-Rich Nitride Horizontal Air-Slot Microdisk Resonators for Biosensing

We report on the fabrication and biosensing application results of luminescent horizontal air slot microdisk resonators based on silicon-rich nitride (SRN). The SRN provides the high refractive index contrast for tight mode confinement and small device sizes, and also emits light in the 800-nm wavelength range that is compatible with both aqueous environment typical of biosensors and standard silicon photodetectors. The 8-mu m-diameter pedestal-type horizontal air-slot disk resonators with 135-nm-thick SRN disks and 25-nm thin air slots were designed for a single-mode operation in the vertical dimension and slot-mode overlap of 17.4 %, and fabricated using photolithography and selective etching. Whispering gallery mode emission with the Q-factors of 6100 is excited via top-pumping, and detected using a Si charge-coupled device detector in a side-photoluminescence setup. Using bovine albumin serum and biotin/streptavidin reaction pair, the surface sensitivity of 4.6 nm/nm and 4.79 nm/(mu g-ml) is demonstrated
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2016-11
Language
ENG
Keywords

WHISPERING-GALLERY MODES; LABEL-FREE; WAVE-GUIDE; ON-INSULATOR; LIGHT; MICROCAVITY

Citation

IEEE PHOTONICS TECHNOLOGY LETTERS, v.28, no.21, pp.2331 - 2334

ISSN
1041-1135
DOI
10.1109/LPT.2016.2593052
URI
http://hdl.handle.net/10203/214398
Appears in Collection
NT-Journal Papers(저널논문)
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