Comparison of Slowness Profiles of Lamb Wave with Elastic Moduli and Crystal Structure in Single Crystalline Silicon Wafers

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Single crystalline silicon wafers having (100), (110), and (111) directions are employed as specimens for obtaining slowness profiles. Leaky Lamb waves (LLW) from immersed wafers were detected by varying the incident angles of the specimens and rotating the specimens. From an analysis of LLW signals for different propagation directions and phase velocities of each specimen, slowness profiles were obtained, which showed a unique symmetry with different symmetric axes. Slowness profiles were compared with elastic moduli of each wafer. They showed the same symmetries as crystal structures. In addition, slowness profiles showed expected patterns and values that can be inferred from elastic moduli. This implies that slowness profiles can be used to examine crystal structures of anisotropic solids.
Publisher
한국비파괴검사학회
Issue Date
2016-02
Language
Korean
Article Type
Article
Citation

비파괴검사학회지, v.36, no.1, pp.1 - 8

ISSN
1225-7842
DOI
10.7779/JKSNT.2016.36.1.1
URI
http://hdl.handle.net/10203/213710
Appears in Collection
RIMS Journal Papers
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