Note: Development of a compact aperture-type XY theta z positioning stage

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In this paper, we propose a new in-plane XY theta z nano-positioning stage that utilizes piezoelectric actuators and flexure mechanisms. The proposed stage has an aperture and is compact, which facilitates its application in measurement equipment, especially those used for biological specimens. The stage has four piezoelectric actuators and four bridge-type flexure mechanisms, which are used to amplify the small motions produced by the piezoelectric actuators. This paper describes the modeling and design optimization of the stage, which has X- and Y-direction motion ranges of 300 mu m and a theta z-direction motion range of +/- 3.9 mrad. The stage measures 150 x 150 x 23 mm, and its aperture is 50 x 50 mm. (C) 2016 AIP Publishing LLC
Publisher
AMER INST PHYSICS
Issue Date
2016-03
Language
English
Article Type
Article
Keywords

PARALLEL MECHANISM; OPTIMAL-DESIGN

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.87, no.3

ISSN
0034-6748
DOI
10.1063/1.4945307
URI
http://hdl.handle.net/10203/209046
Appears in Collection
ME-Journal Papers(저널논문)
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