High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement.

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High sensitivity, on-chip calorimeter platform using V2O5 thin film thermistor was developed. Integration of a V2O5 thermistor with a high temperature sensitivity of -2.2%/K with a vacuum insulated, suspended SIN membrane structure enabled a low thermal conductance of 12 mu W/K and a direct detection of 10 nW of heat with an estimated detection limit of 570 pW. We also investigated the feasibility of integrating the platform with a microfluidic system, and, suggest that, based on numerical simulations, a further 5-fold lowering of detection limit may be possible. (C) 2016 Elsevier B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2016-04
Language
English
Article Type
Article
Keywords

MICROPHYSIOMETER

Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.241, pp.60 - 65

ISSN
0924-4247
DOI
10.1016/j.sna.2016.02.001
URI
http://hdl.handle.net/10203/209031
Appears in Collection
NT-Journal Papers(저널논문)
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