Enhancing the sensitivity of a micro-diaphragm resonating sensor by effectively positioning the mass on the membrane

Cited 1 time in webofscience Cited 0 time in scopus
  • Hit : 305
  • Download : 214
The detection of biomarkers in the liquid phase using mechanical sensors is difficult because of noise caused by the liquid. To reduce and verify the side effects of liquid loading, we performed calculations and experiments to determine the shift in resonant frequency according to the loading conditions. A 2-mu m-thick piezoelectric rectangular micro-diaphragm with a 500 x 500 mu m membrane was used. These dimensions were determined such that there would be an analogous resonant frequency shift ratio in both (1, 1) and (2, 2) modes. By calculating and measuring the resonant frequency, we verified that the resonant frequency of the sensor would change only through contact with the liquid, even the resonant frequency change by only liquid much higher than the changes caused by the nanoparticles. The real signal constituted only 0.017% of the initial resonant frequency. To enhance the sensitivity by reducing the unexpected surface stress in the liquid, the liquid was dropped onto the surface of the micro-diaphragm. This resulted in an improvement of more than 10 times the sensitivity in both modes. In addition, by controlling the position in the micro-diaphragm resonating sensor, more sensitive positions with large displacements were determined according to each mode.
Publisher
NATURE PUBLISHING GROUP
Issue Date
2015-11
Language
English
Article Type
Article
Keywords

NANOPARTICLES; BIOSENSOR

Citation

SCIENTIFIC REPORTS, v.5, pp.1 - 7

ISSN
2045-2322
DOI
10.1038/srep17069
URI
http://hdl.handle.net/10203/207479
Appears in Collection
MS-Journal Papers(저널논문)
Files in This Item
93052.pdf(791.13 kB)Download
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 1 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0