DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shim, Seongbo | ko |
dc.contributor.author | Choi, Suhyeong | ko |
dc.contributor.author | Shin, Youngsoo | ko |
dc.date.accessioned | 2016-05-16T08:45:16Z | - |
dc.date.available | 2016-05-16T08:45:16Z | - |
dc.date.created | 2015-12-29 | - |
dc.date.created | 2015-12-29 | - |
dc.date.issued | 2016-02 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.29, no.1, pp.44 - 49 | - |
dc.identifier.issn | 0894-6507 | - |
dc.identifier.uri | http://hdl.handle.net/10203/207429 | - |
dc.description.abstract | Achieving lithography-friendly layout typically involves repeated heuristic optimization and lithography simulations, and so is very time-consuming. We propose a light interference map (LIM), in which the value of a particular location represents the extent of potential light interference to nearby patterns if some patterns are relocated (or some new patterns are introduced) to that location. LIM of a single pattern (e.g., contact or via) is obtained through repeated lithography simulations but only once. Superposition of single-pattern LIMs then yields the LIM of an arbitrary layout. LIM opens a possibility of prescriptive layout optimization, which is demonstrated through two example applications: optimizing some contact and via positions and SRAF placement. They are evaluated in 28 nm technology in terms of reduced defect probability. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | Light Interference Map: A Prescriptive Optimization of Lithography-Friendly Layout | - |
dc.type | Article | - |
dc.identifier.wosid | 000370751800006 | - |
dc.identifier.scopusid | 2-s2.0-84962494819 | - |
dc.type.rims | ART | - |
dc.citation.volume | 29 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 44 | - |
dc.citation.endingpage | 49 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | - |
dc.identifier.doi | 10.1109/TSM.2015.2512901 | - |
dc.contributor.localauthor | Shin, Youngsoo | - |
dc.contributor.nonIdAuthor | Choi, Suhyeong | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Light interference map | - |
dc.subject.keywordAuthor | lithography-friendly layout | - |
dc.subject.keywordAuthor | OPC | - |
dc.subject.keywordAuthor | SRAF | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.