학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2015.8 ,[vi, 43 p. :]
electrostatic actuator; power switching; large size; wafer; polymer spring; reliability; switch; stand-off voltage; assembly; 정전구동 기계식 소자; 전력스위칭; 큰면적; 웨이퍼; 폴리머스프링; 신뢰성; 스위치; 파괴전압; 조립
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