학위논문(박사) - 한국과학기술원 : 물리학과, 2015.2 ,[ix, 84 p. :]
Impedance; Pulsed plasma; High speed measurement; Dual frequency CCP; 임피던스; 펄스형 플라즈마; 고속 측정; 이중 주파수 CCP
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