A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage

Abstract

This paper presents a novel six-degree-of-freedom magnetic levitation fine stage for a dual-servo stage. The proposed fine stage is levitated and actuated, using a voice coil motor actuator with a Halbach magnet array. For a dual-servo stage, fine stage performance is deeply intertwined with coarse stage performance. Because the fine stage is installed over the coarse stage, the overall size of the fine stage can be limited by the moving plate of the coarse stage. Therefore, magnetic flux modeling and optimization are performed to manufacture optimal fine stages. To control the fine stage, actuator kinetics and sensor kinematics are proposed. Homing control is implemented by using linear variable differential transformers, whereas fine control is implemented by capacitance sensors and laser interferometers. Finally, experimental results of in-position stability, moving range, and repeatability are presented.