Versatile Size and Shape Microlens Arrays With High Numerical Apertures

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We present close-packed microlens arrays (MLAs) with high numerical aperture (NA) over a large range of dimensions based on glass blowing process and replication method. Polydimethylsiloxane (PDMS) MLAs with diameters from 50 mu m to 1 mm and a high NA of 0.37 (maximum achievable NA for a PDMS plano-convex lens) are demonstrated, which are difficult to achieve with the conventional methods for large microlenses. In addition, MLAs with various fill-factors up to 96.1% and different base shapes are demonstrated. By adjusting the cavity depth and the chamber pressure, the ratio of sag height and diameter can be further adjusted. [2013-0359]
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2014-08
Language
English
Article Type
Article
Keywords

FABRICATION

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.23, no.4, pp.771 - 773

ISSN
1057-7157
DOI
10.1109/JMEMS.2014.2305993
URI
http://hdl.handle.net/10203/202948
Appears in Collection
EE-Journal Papers(저널논문)
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