학위논문(석사) - 한국과학기술원 : 기계공학전공, 2015.2 ,[52 p :]
자기부상스테이지; 힘리플; 속도리플; 원통좌표; 적응제어; maglev stage; force ripple; velocity ripple; cylindrical coordinates; RLSE
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.