Device reliability under electrical stress and photo response of oxide TFTs

Abstract

The stability of oxide TFTs has been the main focus of this research and is probably the most crucial requirement for the successful application to flat-panel displays. Although the high Fermi level of oxide semiconductors makes TFTs basically stable under electrical stress, the device reliability under diverse variations of electrical stress is affected by materials such as active semiconductors and gate insulators, processes for the formation of back/front channels and passivation layers, and device configurations among other things. How these factors affect the device reliability have been investigated and a review of the stability is presented. In addition, several categories of the light instability of oxide TFTs is presented and the origin is discussed.