The throughput rate of serial production lines with deterministic process times and random setups: Markovian models and applications to semiconductor manufacturing

Cited 18 time in webofscience Cited 19 time in scopus
  • Hit : 452
  • Download : 0
We conduct exact analysis of serial production lines with deterministic service durations and various classes of random state-dependent setups between customers. Our focus is on assessing the production rate, or just-in-time (JIT) throughput. We demonstrate that such systems can be modeled as a Markov chain and consider various types of setups inspired by clustered photolithography tools in semiconductor manufacturing. We deduce when exact closed form expressions for the production rate are possible and when a numeric solution to the Markov chain balance equations are required. As these systems have shown promise for modeling process bound clustered photolithography tools, we study their accuracy versus detailed simulation for predicting the tool throughput. Various practical features such as the capacity of a pre-scan buffer and batch customers (to model wafer lots) are investigated.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
2015-01
Language
English
Article Type
Article
Keywords

PRODUCTION SYSTEMS; UNRELIABLE MACHINES; DECOMPOSITION METHOD; FINITE BUFFERS; SERVICE TIMES; BOTTLENECKS; STATIONS; CAPACITY; QUEUE

Citation

COMPUTERS & OPERATIONS RESEARCH, v.53, pp.288 - 300

ISSN
0305-0548
DOI
10.1016/j.cor.2014.03.022
URI
http://hdl.handle.net/10203/201028
Appears in Collection
IE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 18 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0