Browse "School of Electrical Engineering(전기및전자공학부)" by Subject 3D patterning

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Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick photoresist

Yoon, Jun-Boresearcher; Han, CH; Yoon, E; Kim, CK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.12B, pp.7081 - 7085, 1998-12

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