Browse "School of Electrical Engineering(전기및전자공학부)" by Subject X-ray mask

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Electron beam damage in the SiN membrane of an X-ray lithography mask

Choi, Sang-Soo; Kim, Jong Soo; Chung, Hai Bin; Yoo, Hyung Jounresearcher; Kim, Bo-Woo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.1, pp.360 - 363, 1998-01

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