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Increasing Capacitance and Self-Resonant Frequency of the MEMS Switched Capacitor Using High-kappa TiO2 and SU-8 Bridged Beam Structure Choi, Seonjin; Han, Chang-Hoon; Yang, Hyun-Ho; Choi, Dong Hoon; Yoon, Jun-Bo, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.24, no.4, pp.1006 - 1015, 2015-08 |
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