Browse "School of Electrical Engineering(전기및전자공학부)" by Subject VACUUM PACKAGE

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Use of nanoporous columnar thin film in the wafer-level packaging of MEMS devices

Lee, Byung-Kee; Choi, Dong-Hoon; Yoon, Jun-Boresearcher, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.20, no.4, 2010-04

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