Browse "School of Electrical Engineering(전기및전자공학부)" by Subject Ta

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Silicide Formation Process of Er Films with Ta and TaN Capping Layers

Choi, Juyun; Choi, Seongheum; Kim, Jungwoo; Na, Sekwon; Lee, Jeong-Hoo; Lee, Seok-Heeresearcher; Kim, Hyoungsub, ACS APPLIED MATERIALS & INTERFACES, v.5, no.23, pp.12744 - 12750, 2013-12

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