Browse "School of Electrical Engineering(전기및전자공학부)" by Subject (110) silicon

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Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon

Lee, D; Yu, Kyoungsikresearcher; Krishnamoorthy, U; Solgaard, O, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, no.1, pp.217 - 227, 2009-02

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