Browse "School of Electrical Engineering(전기및전자공학부)" by Author VANDENABEELE, P

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DEVELOPMENT OF A HEXAGONAL-SHAPED RAPID THERMAL PROCESSOR USING A VERTICAL TUBE

Cho, Byung Jinresearcher; VANDENABEELE, P; MAEX, K, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.7, no.3, pp.345 - 353, 1994-08

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