Browse "School of Electrical Engineering(전기및전자공학부)" by Author Raghavan, Praveen

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Large marginal 2D self-aligned via patterning for sub-5nm technology

Choi, Suhyeong; Lee, Jae Uk; Blanco, Victor; Debacker, Peter; Raghavan, Praveen; Kim, Ryoung-Han; Shin, Youngsooresearcher, SPIE Advanced Lithography, SPIE, 2017-02-26

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