Browse "School of Electrical Engineering(전기및전자공학부)" by Subject Damage curing

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A Comparative Study of the Curing Effects of Local and Global Thermal Annealing on a FinFET

Park, Jun-Young; Lee, Geon-Beom; Choi, Yang-Kyu, IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, v.7, no.1, pp.954 - 958, 2019-08

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