DSpace at KOASAS: Observation and origin of abnormal heptagonal-shape etch pit formed on PVT grown 4H-SiC

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Observation and origin of abnormal heptagonal-shape etch pit formed on PVT grown 4H-SiC

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Jeong, Myoungho / Kim, DY / Hong, S / Eun, TH / Chun, M / Lee, Jeong Yong researcher / Lee, WJ

Publisher: ECS CRM

Issue Date: 2014-09-23

Language: English

Citation: European Conference on Silicon Carbide and Related Materials

URI: http://hdl.handle.net/10203/199296

Appears in Collection: MS-Conference Papers(학술회의논문)

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Observation and origin of abnormal heptagonal-shape etch pit formed on PVT grown 4H-SiC

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