학위논문(석사) - 한국과학기술원 : EEWS대학원, 2012.8, [ vii, 92 p. ]
Al-doped Zinc Oxide; 이중박막 투명전극; 불화아연; 기판 온도; 스퍼터; 산화아연; RF magnetron sputtering; substrate temperature; ZnF2; double-layered TCO
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