Study on the metal nanoparticles sintering for maskless fabrication of electrode pattern using digital micromirror device = 금속나노입자 소결과 DMD를 응용한 전도성 박막의 마스크리스 제조공정에 관한 연구

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Metal thin film fabrication is studied with laser illumination with digital micromirror device (DMD). It is like "optical stamping" of silver (Ag) nanoparticle (NP) ink for the facile fabrication of 2D electrode pattern without any conventional lithographic means or scanning procedure. An arbitrary 2D pattern at the lateral size of 25 μm X 25 μm with 160 nm height is readily produced on a glass substrate by a short exposure of 532 nm Nd:YAG continuous wave laser. The resultant metal pattern exhibits low electrical resistivity of 10.8 uΩ o cm, and also shows a fine edge sharpness by the virtue of low thermal conductivity of Ag NP ink. Furthermore, 10 X 10 star-shaped micropattern array are fabricated through step-and-repeat scheme to ensure the potential of this process for the large-area metal pattern fabrication.
Advisors
Kim, Taek-Sooresearcher김택수
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2014
Identifier
568798/325007  / 020123382
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2014.2, [ iv, 34 p. ]

Keywords

optical stamping; 저온 공정; 비진공 환경; 레이저 소결; 나노 입자 잉크; DMD; digital micromirror device; nanoparticles ink; nanoparticle laser sintering; non-vacuum environment; low temperature thin film patterning; 광학적 도장 공정

URI
http://hdl.handle.net/10203/197546
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=568798&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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