학위논문(석사) - 한국과학기술원 : 기계공학전공, 2014.8, [ ⅵ, 62 p. ]
MEMS; STS wet etching process; Course correction fuze; Safety and Arming Device(SAD); MEMS; STS wet etching 공정; 안전장전장치; 탄도수정신관
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