Fabrication and application of metal nanopattern array by block copolymer lithography = 블록공중합체 리소그래피를 이용한 금속 나노패턴 어레이 제작 및 응용에 관한 연구

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Patterning these nanoscale objects into two-dimensional arrays on substrates has attracted growing interest due to their potential applications. In spite of being relatively easy to synthesize such small structures, preparing nanoarrays with precisely ordered spatial position, has proved challenging. It is necessary to assemble and immobilize nanoscale objects on suitable substrates, which essentially facilitates controlled growth determining their size-dependent properties at the nanometer scale. The advanced nanopatterning methods such as e-beam lithography, scanning probe lithography and nanoimprinting have been explored to overcome the resolution limit of conventional photolithography. However, rather complicated process, low throughput, and technical hardship arising from direct mechanical contact hinder a successful large-area fabrication of densely packed nanostrutures. Alternatively, many efforts based on self-assembly have been made to position and organize the nanoscale building blocks into the ordered fashion. Self-assembly techniques show several advantages over other methods, in that molecular features are precisely controlled, mass-productions are allowed through parallel organization of structures, and intentionally designed complex structures are possible in the molecuar or colloidal systems. Among such systems, block copolymer template has been considered as a representative self-assembled system due to a facile flexibility of nanoscale dimension and morphologies. Block copolymers are self-assembling polymeric materials typically consisting of covalently linked, chemically distinctive macromolecular blocks. The microphase separation of immiscible respective blocks results in spontaneous assembly into nanoscale periodic arrays of spheres, cylinders, or lamellae whose characteristic dimensions are tunable in the range of 3??50 nm. Block copolymer lithography is emerging non-conventional nanolithographic process utilizing self-assembled morpholo...
Advisors
Kim, Sang-Oukresearcher김상욱
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2012
Identifier
568076/325007  / 020085101
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2012.2, [ xiii, 105 p. ]

Keywords

블록공중합체; Catalyst; Nanopatterning; Self-assembly; Nanomaterial; Block copolymer; 나노재료; 자기조립; 나노패터닝; 촉매

URI
http://hdl.handle.net/10203/197313
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=568076&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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