학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2013.2, [ ix, 89 p. ]
nanoelectromehcanical; 기계식 메모리; 기계식 스위치; 나노전자기계; electrothermal actuation; NEM switch; NEMS; NEM memory
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