Design and Optimization of Long Stroke Planar Motion Maglev Stage using Copper Strip Array

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The main purpose of this proposed maglev stage is to transport a 450 mm wafer in a vacuum environment. To realize a long stroke and a large size mover, a stator was designed using a copper strip array. The mover contains a halbach magnet array and the fixture part has characteristics of low weight and high structural bandwidth for fast response. Since the relationship between the design variables and the system performance is complicated, an optimization procedure was used to obtain optimal design variables. Based on the optimization solution, detailed design was performed and the system's stability was checked by several simulations. Finally, the proposed maglev system was manufactured.
Publisher
KOREAN SOC PRECISION ENG
Issue Date
2015-03
Language
English
Article Type
Article
Keywords

MOVING MAGNETS; ACTUATOR; MOVER

Citation

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.16, no.3, pp.479 - 485

ISSN
2234-7593
DOI
10.1007/s12541-015-0065-6
URI
http://hdl.handle.net/10203/195937
Appears in Collection
ME-Journal Papers(저널논문)
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