Design of a Six-Degree-of-Freedom Motion Fine Stage Driven by Voice Coil Motors with Flexural Guides

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Fine stage has been used in various fields of industries. Numerous types of fine stages have been researched and developed. In this paper, a fine stage using voice coil motors as actuators with flexural guides was proposed. The fine stage was mainly designed to eliminate coupled motion by location of VCM and using rotational hinges on flexural guides. System specification was determined by required performance. With the system specification, VCM was optimally designed to satisfy the specification. A flexural guide was conceptually designed to perform six-degree-of-freedom motions.
Publisher
KOREAN SOC PRECISION ENG
Issue Date
2015-01
Language
English
Article Type
Article
Citation

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.16, no.1, pp.203 - 207

ISSN
2234-7593
DOI
10.1007/s12541-015-0027-z
URI
http://hdl.handle.net/10203/195295
Appears in Collection
ME-Journal Papers(저널논문)
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