Multidimensional motion measurement of a bimorph-type piezoelectric actuator using a diffraction grating targetpeg

Precision actuators, such as pick-up actuators for HDDs or CD-ROMs, mostly show multidimensional motion. So, to evaluate them more completely, multidimensional measurement is required. Through structural variation and optimization of the design index, the performance of a measurement system can be improved to satisfy the requirement of this application, and so the resolution of each axis is higher than 0.1 mum for translation and 0.5 arcsec for rotation. Using this measurement system, the multidimensional motion and frequency transfer functions of a bimorph-type piezoelectric actuator are obtained. (C) 2001 American Institute of Physics.
Publisher
Amer Inst Physics
Issue Date
2001-09
Language
ENG
Keywords

MEASUREMENT SYSTEM; 6-DEGREE-OF-FREEDOM

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.72, no.9, pp.3731 - 3733

ISSN
0034-6748
DOI
10.1063/1.1396659
URI
http://hdl.handle.net/10203/1946
Appears in Collection
ME-Journal Papers(저널논문)
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