Improved Electrical Performance and Bias Stability of Solution-Processed Active Bilayer Structure of Indium Zinc Oxide based TFT

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We fabricated active single- and bilayer structure thin film transistors (TFTs) with aluminum or gallium doped (IZO:Al or IZO:Ga) and undoped indium zinc oxide (IZO) thin film layers using an aqueous solution process. The electrical performance and bias stability of these active single- and bilayer structure TFTs were investigated and compared to reveal the effects of Al/Gal doping and bilayer structure. The single-layer structure IZO TFT shows a high mobility of 19 cm(2)/V.s with a poor positive bias stability (PBS) of Delta V-T + 3.4 V. However, Al/Ga doped in IZO TFT reduced mobility to 8.59.9 cm(2)/V.s but improved PBS to Delta V-T + 1.61.7 V due to the reduction of oxygen vacancy. Thus, it is found the bilayer structure TFTs with a combination of bottom- and top-layer compositions modify both the mobility and bias stability of the TFTs to be optimized. The bilayer structure TFT with an IZO:X bottom layer possess high mobility and an IZO bottom layer improves the PBS.
Publisher
AMER CHEMICAL SOC
Issue Date
2014-09
Language
English
Article Type
Article
Keywords

THIN-FILM TRANSISTORS; LOW-TEMPERATURE; CARRIER TRANSPORT; SEMICONDUCTORS; LAYER

Citation

ACS APPLIED MATERIALS & INTERFACES, v.6, no.17, pp.15335 - 15343

ISSN
1944-8244
DOI
10.1021/am5037934
URI
http://hdl.handle.net/10203/192777
Appears in Collection
MS-Journal Papers(저널논문)
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