UV-curing hybrid resists for nanoimprint lithography (NIL) using diazoketo functionalized POSS hybrid resist
- Issue Date
- 2014-05-26
- Language
- English
- Citation
E-MRS 2014 SPRING MEETING
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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