Improvement of bias stability of oxyanion-incorporated aqueous sol-gel processed indium zinc oxide TFTs

Abstract

Oxyanion-incorporated indium zinc oxide (IZO) TFTs exhibiting excellent bias stabilities are fabricated from aqueous IZO precursor solutions blended with a catalytic amount of inorganic acids (H2SO4, H3PO4, H3BO3). The resulting oxyanion-incorporated IZO TFTs (SO-IZO, PO-IZO, BO-IZO) exhibit improved bias stabilities under NBS, PBS, NBTS, and PBTS conditions.