Vacuum gate dielectric gate-all-around nanowire for hot carrier injection and bias temperature instability free transistor

Cited 21 time in webofscience Cited 18 time in scopus
  • Hit : 515
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorHan, Jin-Wooko
dc.contributor.authorMoon, Dong-Ilko
dc.contributor.authorOh, Jae Subko
dc.contributor.authorChoi, Yang-Kyuko
dc.contributor.authorMeyyappan, M.ko
dc.date.accessioned2014-09-02T02:36:08Z-
dc.date.available2014-09-02T02:36:08Z-
dc.date.created2014-06-26-
dc.date.created2014-06-26-
dc.date.issued2014-06-
dc.identifier.citationAPPLIED PHYSICS LETTERS, v.104, no.25-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10203/189869-
dc.description.abstractA gate-all-around (GAA) field effect transistor with vacuum gate dielectric is presented as a structure free from hot-carrier injection and bias temperature instability. A conventional GAA fabrication process is used along with selective removal of the sacrificial gate oxide as an extra process step. The lowered dielectric constant in vacuum gate dielectric can be compensated by the nature of the nanowire and physical oxide thickness reduction. As the nanowire channel is fully surrounded by empty space, reliability issues relevant to the gate dielectric can be completely cleared.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectMOSFET-
dc.titleVacuum gate dielectric gate-all-around nanowire for hot carrier injection and bias temperature instability free transistor-
dc.typeArticle-
dc.identifier.wosid000338515900093-
dc.identifier.scopusid2-s2.0-84949576080-
dc.type.rimsART-
dc.citation.volume104-
dc.citation.issue25-
dc.citation.publicationnameAPPLIED PHYSICS LETTERS-
dc.identifier.doi10.1063/1.4885595-
dc.contributor.localauthorChoi, Yang-Kyu-
dc.contributor.nonIdAuthorHan, Jin-Woo-
dc.contributor.nonIdAuthorOh, Jae Sub-
dc.contributor.nonIdAuthorMeyyappan, M.-
dc.type.journalArticleArticle-
dc.subject.keywordPlusMOSFET-
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 21 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0