Ultra-low voltage MEMS switch using a folded hinge structure

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An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam structure to be suspended with a designed air gap, effectively suppressing unwanted deflection. The actuation voltage of the switch was measured to be 1.7 V, the lowest among electrostatic switches. There was no variation in the actuation voltage until 106 cyclic actuations, showing the stability of a low actuation voltage in electrostatic actuation for the first time. The contact resistance was around 12 Ω, caused by a low contact force below 1 μN despite an Au–Au contact.
Publisher
SpringerOpen
Issue Date
2014-06
Language
English
Citation

Micro and Nano Systems Letters, v.2, no.2

ISSN
2213-9621
DOI
10.1186/s40486-014-0002-y
URI
http://hdl.handle.net/10203/189868
Appears in Collection
EE-Journal Papers(저널논문)
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