Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier

Abstract

This paper presents the development of a new compact three-axis compliant stage employing piezoelectric actuators and a new flexure structure. A proposed stage works out-of-plane (Z, theta(x), theta(y)) direction. The stage consists of 4 amplification flexures mounted piezoelectric actuators. New structure of flexure reduces height and enhances dynamic performance of stage. To certify excellent performance of the stage, comparison accomplished between conventional amplification flexure and new compact bridge type flexure. Modeling and optimal design of new type nano positioning stage performed. The optimal design is executed on the geometric parameters of the proposed flexure structure using Sequential Quadratic Programming. Experiments are carried out to verify the static and dynamic performance of the stage. The proposed out-of-plane nano-positioning stage has a Z-directional motion range 190 mu m and a theta(x), theta(y)-directional motion range +/- 2 mrad. The resolution of the stage is 4 nm, 40 nrad, and 40 nrad in the Z-, theta(x)-, and theta(y)-directional motions, respectively. The size of stage is 150 x 150 x 30 mm(3).