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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

THREE-DIMENSIONAL (3-D) RESHAPING TECHNIQUE IN MEMS DEVICES BY SOLELY ELECTRICAL CONTROL WITH ULTRAFINE TUNING RESOLUTION

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dc.contributor.authorYoon, Yong-Hoonko
dc.contributor.authorHan, Chang-Hoonko
dc.contributor.authorYoon, Jun-Boko
dc.date.accessioned2014-08-28T07:49:25Z-
dc.date.available2014-08-28T07:49:25Z-
dc.date.created2014-07-08-
dc.date.created2014-07-08-
dc.date.created2014-07-08-
dc.date.issued2014-01-30-
dc.identifier.citationThe 27th IEEE International Conference on Micro electro Mechanical System, MEMS 2014, pp.660 - 663-
dc.identifier.urihttp://hdl.handle.net/10203/188340-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleTHREE-DIMENSIONAL (3-D) RESHAPING TECHNIQUE IN MEMS DEVICES BY SOLELY ELECTRICAL CONTROL WITH ULTRAFINE TUNING RESOLUTION-
dc.typeConference-
dc.identifier.wosid000352217500170-
dc.identifier.scopusid2-s2.0-84898957442-
dc.type.rimsCONF-
dc.citation.beginningpage660-
dc.citation.endingpage663-
dc.citation.publicationnameThe 27th IEEE International Conference on Micro electro Mechanical System, MEMS 2014-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationSan Francisco-
dc.identifier.doi10.1109/MEMSYS.2014.6765727-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorYoon, Yong-Hoon-
dc.contributor.nonIdAuthorHan, Chang-Hoon-
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