Diameter control of an extremely thin cylindrical microprobe by electrochemical etching

Electrochemical etching is shown to produce slender cylindrical tungsten probes used as microelectrodes for micromachining or in electrochemical studies. A mathematical model is derived for diameter control of the microprobes and its validation is investigated through experiments. (C) 2000 American Institute of Physics. [S0034-6748(00)03405-5].
Publisher
AMER INST PHYSICS
Issue Date
2000-05
Language
ENG
Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.71, no.5, pp.2166 - 2168

ISSN
0034-6748
URI
http://hdl.handle.net/10203/1882
Appears in Collection
ME-Journal Papers(저널논문)
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