DSpace at KOASAS: Non-destructive surface profile measurement of a thin film deposited on a patterned sample

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Non-destructive surface profile measurement of a thin film deposited on a patterned sample

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Kim, DS / Chegal, Won / Kim, Soohyun researcher / Kong, HJ / Lee, YW

Publisher: American Institute of Physics

Issue Date: 2003-09-30

Language: English

Description: 2003 International Conference on Characterization and Metrology for ULSI Technology

Citation: 2003 International Conference on Characterization and Metrology for ULSI Technology, pp.357 - 361

URI: http://hdl.handle.net/10203/1877

Appears in Collection: ME-Conference Papers(학술회의논문)

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