Non-destructive surface profile measurement of a thin film deposited on a patterned sample

Publisher
American Institute of Physics
Issue Date
2003-09-30
Language
ENG
Description

2003 International Conference on Characterization and Metrology for ULSI Technology

Citation

2003 International Conference on Characterization and Metrology for ULSI Technology, v.683, no.1, pp.357 - 361

URI
http://hdl.handle.net/10203/1877
Appears in Collection
ME-Conference Papers(학술회의논문)
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