Fabrication of Nano-Gap Electrodes with Controlled Gap-Widths Using Atomic-Layer-Deposited Sacrificial Layer
- Publisher
- -
- Issue Date
- 2005-03-28
- Language
- English
- Citation
2005 MRS Spring Meeting
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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